Abstract: Real-time monitoring of vibration of horizontal directional drilling bottom hole drilling tools is of great significance for ensuring drilling safety and improving drilling efficiency. Traditional vibration sensors have limitations in power supply,while self-powered vibration sensors are more suitable for actual working conditions. Based on the principle of triboelectric nanogenerator,this study proposes a novel self-powered vibration sensor that can fully utilize the induced electricity generation during the drilling process and simultaneously measure the vibration frequency. Experimental results show that the sensor can work normally in a temperature range of 0 ℃ to 105 ℃ and a relative humidity range of 0% to 90%, with a vibration frequency measurement range of 0 Hz to 13 Hz and a measurement error of less than ±3%. Additionally,the sensor can be installed on a plane with a tilt angle of less than 45°. Furthermore,the power output of the sensor can reach a maximum of 0. 61 μW,and when used in parallel with multiple sensors for power storage,it can supply power to other underground measuring instruments. The research findings can provide valuable reference for developers of underground measurement and sensor equipment.